0551-68998684
      雙溫區CVD管式梯度爐當前位置:首頁產品中心 > 雙溫區CVD管式梯度爐

      FGL系列雙溫區-管式梯度爐(T max 1700℃和T max 1400)

      FGL系列雙溫區-管式梯度爐專門設計用于有溫度梯度要求的CVD工藝。兩個溫區獨立控制,溫區可單獨使用。在同一腔體內實現不同的溫度差,是CVD工藝的專用理想設備。

      特點

      u 智能程序控溫儀控制精準、可編輯、儲存并調用多段程序

      u 爐殼結構,雙層爐殼風冷結構

      u 采用不銹鋼雙層密封法蘭,進、出氣配美標針閥

      u 兩端可調節式法蘭支撐結構,延長剛玉管使用壽命

      u 超溫保護功能,當溫度超過允許設定值自動斷電

      u 安全保護當爐體漏電時自動斷電

      u LED高強度抗破壞全不銹鋼按鈕,經久耐用


      拓展選件:

      u爐內測量系統:(氧含量檢測系統、溫度檢測系統)

      u真空系統:(旋片式機械泵、擴散泵機組、分子泵機組)

      u氣氛系統:(浮子流量計、質量流量計)

      u監控系統:(溫度記錄儀、觸摸屏遠程監控)


      技術參數:

      設備型號

      高溫

      使用溫度

      管徑

      /低溫區長度

      熱偶

      電壓

      功率

      FGL-50/17/2

      1700

      高溫區溫度

      1000-1600

      低溫區溫度

      RT-1000

      50mm

      200/200mm

      B/S

      220V

      6.0KW

      FGL-60/17/2

      1700

      60mm

      200/200mm

      B/S

      220V

      FGL-70/17/2

      1700

      70mm

      200/200mm

      B/S

      220V

      FGL-80/17/2

      1700

      80mm

      200/200mm

      B/S

      220V

      FGL-50/14/2

      1400

      高溫區溫度

      RT-1300

      低溫區溫度

      RT-1000

      50mm

      200/200mm

      S/K

      220V

      9.0KW

      FGL-60/14/2

      1400

      60mm

      200/200mm

      S/K

      220V

      FGL-70/14/2

      1400

      70mm

      200/200mm

      S/K

      220V

      FGL-80/14/2

      1400

      80mm

      200/200mm

      S/K

      220V

      注:給出的最高溫度為工作管外測定,其它溫區個數和加熱區長度可根據客戶工藝要求定制。


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      銷售熱線:0551-6899868413966718548 方先生

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